Nanogrowth system for carbon nanotube structure offers precision and repeatability

The NanoGrowth sytems are designed for the fabrication of carbon nanotube structures. It offers a very high degree of precision and repeatability built into the tool, and the ability to grow materials at low temperatures that are compatible with commercial semiconductor processes. The tool design provides a stable platform capable of prototyping and fabricating structures repeatably, combined with flexibility that allows configurations to be built to serve individual development ideas. It comes with both CVD (chemical vapor deposition) and PECVD (plasma-enhanced CVD) processing capability. Options include further processing techniques such as ICP (inductively coupled plasma), dual sputter sources for catalyst deposition and modules to add process stages for automated pilot production or high throughput, Including an automated wafer transport load/lock system, integrated etching capability, and a PECVD module for deposition of thin-film silicon-based materials.

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