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New Industrial Products

Air Bearing Stage

Four travel options from 200 to 500 mm

Posted on January 21, 2011 - ( views)

by Web Editor

Available in four travel options from 200 to 500 mm and a nominal width of 400 mm, the ABL1500WB from Aerotech is a wide base version of the former ABL1500 air-bearing linear translation stage, which is suitable for high precision positioning of heavy and offset loads or used as a base for X-Y systems, where maximum support is essential. With a powerful dual linear motor drive and choice of standard precision or high accuracy linear encoders, it can support a direct load of 60 kg with submicrometer resolution and accuracy, as well as with speed and acceleration up to 2 m/s and 2g respectively.  The all aluminium stage is aimed at high throughput manufacturing and test applications in semiconductor or nanotechnology production that require no-compromise performance for scanning or step and repeat positioning. It benefits from the company's active air preload system for certified straightness/flatness of under ± 2.0 µm for the 500 mm travel version (± 0.5 µm for the 200 mm version). A choice of standard or HALAR calibrated accuracy is available for each travel version and each encoder option. HALAR calibration includes an extensive interferometer based measurement procedure for improved accuracy and repeatability with the variation between the encoder position and the actual stage position placed as a look up table in the company’s motion controller. The active air bearing design maintains equal pressure on both vertical and horizontal bearing surfaces and distributes the stage load over the maximum area, resulting in high stage stiffness with better offset load handling characteristics compared to competitive air bearing designs. Furthermore, with brushless linear servo motors, non contacting encoders and air bearings, the stage has negligible friction and is specified for a 30,000 h MTBF, with minimal maintenance requirements. The dual BLMC series brushless linear servomotors provide a smooth backlash-free motion and a choice of the company’s PWM or linear technology amplifiers allows the user to select the best performance characteristics for the application. HP series PWM amplifiers will suit µm level resolution and provide the highest speeds and acceleration performance. For ultimate position and speed control combined with nanometre level in-position stability, the HL and ML series linear stage amplifiers are essential. The ABL1500WB may be supplied individually or with other positioning mechanics from the company as a multi-axis engineered system, complete with chain type cable management and orthogonality to within 2 arc-sec. Engineered systems enable OEMs and machine builders to realise their total automation needs and can include granite base, cabinet frames, special fixtures and a wide choice of advanced motion and machine controls that combine to improve development timescales,  production throughput and the final quality of the customers product.

Edited by: Teoman Tugsuz


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