The THK-models CGL15N and CGL20N are suitable for clean room applications according to ISO14644-1 class 4, equivalent to FED209D Class 10. The particle emission of the linear actuator during operation is reduced by several design features. This includes a specifically engineered seal mechanism and a full size cover. In addition a low dust generative grease is used, designated for applications under clean room environment. The corrosion resistance of the inner LM Guide and ballscrew is assured by a coating of THK-type AP-C. Long-term maintenance-free operation of the integrated drive and LM Guide devices is provided thanks to the use of the caged ball technology. The available standard lengths of the CGL15N series range from 340mm to 1.420mm. With the CGL20N version, the lengths stepped from 460mm to the maximum of 1.780mm. The positioning repeatability for CGL actuators is confirmed as within Â± 0.02mm.