Bronkhorst manufactures metal sealed mass fl ow meters/controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Optional downport connections (c-seal/w-seal) are offered to reduce mounting space, while facilitating installation and maintenance.
Digital Mass Flow Controller
for the semicon market
- by Bronkhorst High-Tech B.V.
- October 1, 2009
- 3035 views
Digital Mass Flow Controller
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