Liquid Flow Sensor

  Enquire / contact me

For low-volume dosing applications

Sensor Technology

Liquid Flow Sensor
Liquid Flow Sensor

Sensirion is launching a flow sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible. Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The compact, lightweight device is equipped with fittings for 4 x 3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

Posted on July 8, 2011 - (1200 views)
by
Sensirion AG
Laubisrütistrasse 50
8712 Stäfa ZH - Switzerland
+41-44-306 40 00
+41-44-3064030
View full company profile
Description

Sensirion is a leading manufacturer of high-performance humidity sensors and flow sensor solutions. The product range includes humidity & temperature sensors, gas and liquid flow sensors, mass flow controllers, and differential pressure sensors.

Location
More products from this supplier
Related articles
3D Scanning and Inspection Solutions
Get your Free Ticket to Hannover Messe 2019
LMI Technologies Receives the Certification for Integration with Universal Robots
SIKO Presents the PositionLine at SPS IPC Drives 2018 with IEN Europe
SIKO Presents the MagLine at SPS IPC Drives with IEN Europe
Training for Testing RFID Sensors
Inertial Measurement Units for Smartphone
Positioning with Large Reading Window
Industrial Humidity Transmitter EE23
High-Pressure Flowmeter Measures Liquid Refrigerants
Sensing Innovation in Process and Control
Mechanical Position Sensor MP600 Series
The Internet of Things Starts with a Sensor
Temperature Sensors
Smart Sensors Sensorik 4.0
Compact True Color Recognition Sensor
Sensing Innovation in Process and Control
Level Switches RFS-9 and RFS-12
Draw-Wire Sensors for Displacement, Length and Position
Mechatronic Products
LMI Technologies Receives the Certification for Integration with Universal Robots
SIKO Presents the PositionLine at SPS IPC Drives 2018 with IEN Europe
SIKO Presents the MagLine at SPS IPC Drives with IEN Europe
Ultra-Low Power Accelerometer for IoT
Measuring the Position of Hydraulic and Telescopic Cylinders
Smart Process Gating Method
3D Smart Sensors
Compact Rugged Pressure Transmitters
MicroScan3 Safety Laser Scanner
Torque Sensors and maXYmos TL Monitors