Liquid Flow Sensor

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Liquid Flow Sensor
Liquid Flow Sensor

Sensirion is launching a flow sensor for flow rates below 2 cc/sec (120 ml/min) with hydrocarbon-based liquids such as photoresists and solvents. Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and high sensitivity for flow rates down to 0.05 cc/sec (3 ml/min). Detection of air bubbles in the microliter range is also possible. Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The compact, lightweight device is equipped with fittings for 4 x 3mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

Posted on July 8, 2011 - (1200 views)
by
Sensirion AG
Laubisrütistrasse 50
8712 Stäfa ZH - Switzerland
+41-44-306 40 00
+41-44-3064030
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Description

Sensirion is a leading manufacturer of high-performance humidity sensors and flow sensor solutions. The product range includes humidity & temperature sensors, gas and liquid flow sensors, mass flow controllers, and differential pressure sensors.

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