Integrated XY Linear Motor Stage

Aerotech's PlanarDL-series stages offer high geometric and dynamic performance in a compact, low-profile package. Available in nine different travel and performance configurations, this stage can be used for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing. The XY design allows for high planar geometric performance in applications where straightness and flatness of motion are critical. High-precision, anti-creep crossed-roller bearings, precision-machined surfaces and the supplier's linear motors driving through the axes' center-of-stiffness result in very good geometric tolerances. The stages' structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the device enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership.