The ANT130-XY linear dual-axis stages offer nanometer-level performance in travels up to 160x160mm and allow travel in two dimensions with an exceptionally low profile of 85mm. With high resolution (1nm), repeatability (75nm) and accuracy (250nm) per axis, the stages support all applications that require nanopositioning performance with extreme in-position stability and smooth motion. The stages are designed for use in a wide range of research and development and manufacturing fields. These include data storage, semiconductor, laser micromachining, medical, sensor testing, inspection, material deposition and MEMS/nanotechnology device fabrication.
The stages use advanced direct-drive technology as well as crossed-roller bearings to achieve the highest level of positioning performance. The direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable motion in both the X and Y dimensions. The design allows critical elements such as orthogonality, straightness and flatness to be optimized, resulting in a stage with exceptional geometrical tolerances. Its integrated cable management system is designed to minimize drag forces.