Aerotech's new AXR series 2-axis rotary micropositioning assemblies combine yaw and tilt axes that enable high speed and high throughput micromachining of complex 3D structures such as MEMS components. As part of the enabling technology for many microfabrication techniques, the rotary assembly provides a platform for positioning and manipulation from a precision aligned hemispherical surface. With two standard module sizes offering nominal system loads of 15 kg or 30 kg, the AXR includes a direct-drive yaw (B) axis capable of unlimited rotation up to 1000 rpm with a sub arc-sec position resolution. The second tilt (A) axis offers a fixed rotation over -10 to +100 degrees and is available with brushless servomotor direct-drive for high speed positioning to 720 degrees/sec, or for the larger sized version as a servomotor driven geared option with an anti-backlash harmonic gearbox that offers a much higher continuous torque that will suit heavier load applications where lower speed operation and reduced overall accuracy is tolerable.
Edited by: Jürgen Wirtz
