Turbo Molecular Pumps

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Hydraulics & Pneumatics

Turbo Molecular Pumps
Turbo Molecular Pumps

Shimadzu Corporation launches the company's new TMP-X2905/X3405 series of turbo molecular pumps with integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel display manufactures. Turbo molecular pumps (TMP) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level. TMP are essential components for the manufacture of semiconductors and flat panel displays where oil free, clean, high vacuums are essential. The pumps in this series are versatile, being compact with integrated power supplies for installation in both light and hard processes.

Posted on September 2, 2013 - (1341 views)
by
Shimadzu Corporation
Semiconductor Equipment Division Nishinokyo Kuwabara-cho Nakagyo-ku
604-8511 Kyoto - Japan
+81-75-823-1111
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