Shimadzu Corporation launches the company's new TMP-X2905/X3405 series of turbo molecular pumps with integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel display manufactures. Turbo molecular pumps (TMP) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level. TMP are essential components for the manufacture of semiconductors and flat panel displays where oil free, clean, high vacuums are essential. The pumps in this series are versatile, being compact with integrated power supplies for installation in both light and hard processes.
Turbo Molecular Pumps
With integrated power supplies
- by Shimadzu Corporation
- September 2, 2013
- 1479 views