LBA differential pressure sensors from Sensortechnics are based on thermal mass flow measurement of air or gas through a micro-flow channel integrated within the silicon sensor chip. Due to the highly sensitive measuring principle the LBA sensor achieves high resolution and offset stability. The sensor offers, ultra-low pressure ranges from 25 Pa Full Scale in addition to the existing 250 Pa and 500 Pa ranges. The sensors perform fully analog on-chip CMOS signal conditioning to allow for linear and temperature compensated outputs with fast response times. By integrating the micro-flow channel on the sensor chip level, the gas flow through the sensors is decreased by several magnitudes compared to conventional flow-based pressure sensors. This low flow ensures high immunity to dust contamination and condensation and allows the use of connecting tubes and input filters without the need to recalibrate or correct the output signal. Further, complex housing constructions are eliminated.