Calex's PyroMini 0.9 infrared pyrometer is able to view into a vacuum chamber through a quartz or glass window, and measure the temperature of the surface of the silicon wafer. Temperature ranges from 350°C to 2000°C are available, and the low-temperature 350°C to 800°C model opens up new opportunities for temperature monitoring and control in silicon wafer processing. Stable and repeatable measurements can be taken continuously for long periods, with a fast response time of just 240 milliseconds.
With the optional MicroSD Card installed, over a year of data can be logged, even at the fastest sample rate of one reading per second. The highest possible accuracy is provided by the PyroMini 0.9's short-wavelength detector, which ensures that any error in emissivity setting or change in emissivity has the minimum effect on the measurement.